Layer termination from ellipsometric information is thoroughly built-in into Aeres®. Many different multi-wavelength and spectroscopic ellipsometry options are offered with the ion beam sputter deposition procedure.

In-situ optical monitoring and control is offered by Angstrom’s optical monitoring & Handle package.

Goal rotation and carousel indexing Each individual have torque sense, preventing any system difficulties as a consequence of slips or jams in rotation.

In-situ ellipsometry delivers crucial information on the efficiency of the optical movie although it can be being deposited.

Our Reticle® ion beam sputter deposition programs are intended and engineered to make specific optical films of the very best purity, density, and steadiness.

Variable angle stages permit for pretty powerful slender film methods. On the other hand, among its greatest worries is reproducibility. The substrate is frequently established at an exceptionally oblique angle in relation for the source, as well as the movies are extremely delicate towards the precision of the angle.

Angstrom Engineering® models and engineers Every Reticle® System to offer our partners in the optics Group the chance to develop the movies they need with superb purity, density, and uniformity, all in a very highly repeatable and automatic trend.

Usually, a QCM is utilized to calibrate an Preliminary deposition charge just before finishing the layer thickness less than time control with a fixed beam latest. Shuttering the crystal will drastically prolong its running life time in the course of very long processes or on methods that has a load lock.

IBSD processes may also utilize a secondary ion resource for substrate cleaning and energetic aid, substrate heating for reactive deposition, As well as in-situ optical checking or ellipsometry for essential layer thickness termination. 

The IBSD procedure creates a really energetic flux of deposition substance, resulting in films with improved density, hardness, and floor roughness compared to All those deposited by evaporation processes.

The deposition ion resource is directed towards a fabric focus on that has been optimized in both measurement and Titanium for deposition processes posture for your essential deposition geometry.

Self-aligned ion optics are configured specifically for the desired deposition needs and geometry of the approach.

A small-frequency neutralizer guarantees secure beam operation with out contamination from a conventional filament.

A shuttered QCM Situated near the substrate gives comments within the deposition price and Bodily thickness of the increasing film.

Considerate style on the ion beam concentrating optics confines the beam fully to the region on the target, getting rid of any risk of contamination.